เอกสารการประชุมวิชาการและเสนอผลงานวิจัย มหาวิทยาลัยทักษิณ ครั้งที่ 19 2552 - page 103

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1
¤´˜·šµŠÂŠ °Š„¦³‹„³šo°œ‡ªµ¤¦o°œš¸É¤¸ÁŠ·œ°´¨¨°¥—rÁž}œ´Êœ®¨´„—oª¥ª·›¸‹Îµ¨°ŠÂ
Optical Property of Ag-alloy Based Heat Mirror by Simulation Technique
œ·¦´œ—¦r ª·š·˜°œ´œ˜r1*, ¡´•œ³ ¦´„‡ªµ¤» 2, ¡·Á¬“ ¨·Ê¤»ª¦¦–3
Nirun Witit-anun1*, Pattana Rakkwamsuk 2, and Pichet Limsuwan3
š‡´—¥n°
¢d ¨r¤µŠÁŠ·œ¤¸ ¤´˜·šµŠÂŠš¸É—¸Á®¤µ³Îµ®¦´Áž}œ´Ê œ³šo°œ°·œ¢¦µÁ¦— °Š„¦³‹„³šo °œ‡ªµ¤¦o°œš¸É¤¸
ǦŠ¦o µŠÂ TiO2/Ag/TiO2 °¥n µŠÅ¦„È—¸¢d¨r¤µŠÁŠ·œÁºÉ°¤£µ¡Å—oŠnµ¥Á¤ºÉ°´¤Ÿ´ „p °°„Ž·Á‹œ¦³®ªn µŠ„µ¦Á‡¨º°
ž{ ®µœ¸Ê„oŗo ץčoÁŠ·œ°´ ¨¨°¥—ršœÁŠ· œ¦· »š›·Í š‡ªµ¤œ¸ÊÁž} œ¦µ¥Šµœ„µ¦«¹ „¬µ‡ªµ¤Áž}œÅžÅ—oĜ„µ¦Äo
¢d ¨r¤µŠÁŠ·œ°´¨¨°¥—rÁž}œ´Êœ³šo °œ°·œ¢¦µÁ¦— °Š„¦³‹„³šo °œ‡ªµ¤¦o°œ ×¥Á‡¨º°¢d ¨r¤µŠÁŠ·œ°´¨¨°¥—r¨³
¢d ¨r¤µŠÅššµÁœ¸ ¥¤Å—°°„ÅŽ—r š¸É¤¸‡ªµ¤®œµÁšn µ„´ 30 nm œ„¦³‹„Ũ—r—oª¥¦³—¸Ž¸Â¤„œ¸ ˜¦°œž{˜Á˜°¦·Š
Á¡ºÉ°Äo®µ‡n µ‡Šš¸ÉšµŠÂŠ (n ¨³ k ) —oª¥Ãž¦Â„¦¤ TFCalc Ž¹ÉŠÁž}œÃž¦Â„¦¤Îµ®¦´°°„¢d¨r¤µŠÂŠ¡ªnµ
š¸É ‡ªµ¤¥µª‡¨ºÉœÂŠÁšnµ„´ 500 nm ¢d¨r¤µŠÁŠ·œ°´¨¨°¥—r¤¸‡nµ n= 0.05 ¨³ k = 2.92 –³š¸É¢d ¨r¤µŠÅššµÁœ¸ ¥¤
ŗ°°„ÅŽ—r¤¸‡nµ n= 2.38 ¨³ k = 0 ‡nµ„µ¦nŠŸnµœÂŠ‹µ„„µ¦‹Îµ¨°ŠÂ—o ª¥Ãž¦Â„¦¤ TFCalc Á¤ºÉ°Âž¦‡nµ
‡ªµ¤®œµ´ÊœÁŠ·œ°´¨¨°¥—r °Š„¦³‹„³šo°œ‡ªµ¤¦o°œš¸É ¤¸Ã‡¦Š¦oµŠÂ TiO2(30 nm)/ Ag-alloy(x)/TiO2(30nm)
¦»žÅ—oªnµ¢d¨r¤µŠÁŠ·œ°´¨¨°¥—r¤¸«´„¥£µ¡š¸É‹³œÎµ¤µÄoÁž}œ´Êœ³šo°œ°·œ¢¦µÁ¦— °Š„¦³‹„³šo°œ‡ªµ¤¦o°œÅ—o
‡ÎµÎµ‡´: „¦³‹„³šo°œ‡ªµ¤¦o°œ ¢d¨r¤µŠ ¤„œ¸˜¦°œž{˜Á˜°¦·Š ÁŠ·œ°´¨¨°¥—r ŚšµÁœ¸¥¤Å—°°„ÅŽ—r
Abstract
Silver thin films possess many excellent optical properties; it is suitable for use to be an IR-reflected
layer of heat mirror with TiO2/Ag/TiO2 structure. However, it easily degrades when exposed to O 2 during the
deposition sequence. This problem may be solved by using Ag-alloy instead of pure Ag. This paper presents the
results of the feasibility study to use Ag-alloy thin film as an IR-reflected layer of heat mirror. Thin films of Ag-
alloy and TiO 2 thin film with a thickness of 30 nm were deposited on slide glasses by DC magnetron sputtering.
The optical constants (n and k) of Ag-alloy and TiO2 thin films were evaluated by TFCalc, the optical thin films
design software. The optical constant of Ag-alloy thin film, at 500 nm, are n= 0.05 and k = 2.92 while TiO2 thin
film are n= 2.38 and k = 0. The simulated results of the transmittance from TFCalc, that varies with the thickness
of Ag-alloy layer of heat mirror with TiO2(30 nm)/Ag-alloy(x)/TiO2(30nm) structure, it can be concluded that
Ag-alloy thin film could potentially serve as an IR-reflected layer of the heat mirror.
Keywords: heat mirror; thin film; magnetron sputtering; Ag-alloy; Titanium dioxide
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* Corresponding author. Ú¦«´ ¡šr/Ú¦µ¦ 038103084Email-nirun@buu.ac.th.