เอกสารการประชุมวิชาการและเสนอผลงานวิจัย มหาวิทยาลัยทักษิณ ครั้งที่ 19 2552 - page 1387

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¼Š 370.0 mm ˜·—˜´ÊŠÁžj µÅššµÁœ¸¥¤ (99.97%) œµ—ÁoœŸnµœ«¼œ¥r„¨µŠ 54.0 mm š¸É‡µÃš— ¦³Á‡¦ºÉ °Š¼» µ„µ«
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Range Gauge „µ¦‹nµ¥Â„p š¸Éčo Ĝ„¦³ªœ„µ¦Á‡¨º°‡ª‡»¤—oª¥»—‡ª‡»¤„µ¦Å®¨¤ª¨ (mass flow controller)
°Š MKS type 247D „n°œ„µ¦Á‡¨º °‹³šÎµ‡ªµ¤³°µ—®œoµÁžjµµ¦Á‡¨º°Ã—¥„µ¦ž{˜Á˜°¦r®œoµÁžjµµ¦Á‡¨º°
(pre-sputtering) Ĝ¦¦¥µ„µ« °ŠÂ„p °µ¦r„°œž¦³¤µ– 10 œµš¸ ×¥žd —Ÿnœ´Š (shutter) š¸É˜·—˜´Ê Š¦³®ªnµŠ®œoµ
Ážjµµ¦Á‡¨º°„´ ÂšnœªµŠª´ —»¦°Š¦´
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Ážjµµ¦Á‡¨º°Ášnµ„´ 16 cm ¨—‡ªµ¤—´œÄœ®o°ŠÁ‡¨º°Ä®oŗo ‡ªµ¤—´œ¡ºÊœÁšnµ„´ 3.0x10-5 mbar ¨o ªž¨n°¥Â„p Á oµ¼n
£µœ³»µ„µ«—oª¥°´˜¦µÅ®¨Â„p °µ¦r „°œ˜n°Â„p °°„Ž·Á‹œÁšnµ„´ 1 sccm : 4 sccm ‡ªµ¤—´œ¦ª¤ –³Á‡¨º°š¸É
Áž}œ˜´ªÂž¦„ε®œ—Ä®o‡Šš¸ÉÁšnµ„´ 3x10-3 mbar, 5x10-3 mbar ¨³ 7x10-3 mbar „ε¨´ŠÅ¢¢jµ –³Á‡¨º°Ášnµ„´ 215 W
×¥¢d¨r¤Â˜n¨³»—‹³Äo Áª¨µÁ‡¨º°œµœ 4 ´ÉªÃ¤Š
¢d ¨r¤ÅššµÁœ¸ ¥¤Å—°°„ÅŽ—rš¸ÉÁ‡¨º°Å—o‹³œÎµÅž˜¦ª‹°Ã‡¦Š¦oµŠŸ¨¹„—o ª¥ Á‡¦ºÉ°ŠÁ¨¸Ê ¥ªÁœ¦´Š¸Á°„Žr
(X-ray Diffractometer) °Š Rigaku ¦»nœ Rint 2000 ˜¦ª‹ª´— 2T-scan —o ª¥¤»¤˜„„¦³šÁŒ¸¥Š (glazing incident
angle) ‡Šš¸ÉÁšnµ„´ 3O „œ 2T ‹µ„ 20O ™¹Š 70O ¨´„¬–³¡ºÊœŸ·ªÂ¨³‡ªµ¤®œµ¢d ¨r¤«¹ „¬µ—oª¥Á‡¦ºÉ°Š°³˜°¤¤·‡¢°¦rŽ
ŤÇ¦Ã‡ž (Atomic Force Microscope ; AFM) °Š Veeco Instrument Inc. ¦»n œ Nano Scope IV
¤´˜·Ã¢Ã˜‡³˜³Å¨˜·„‹³ž¦³Á¤·œÃ—¥¡·‹µ¦–µ‹µ„„µ¦¨µ¥µ¦¨³¨µ¥Á¤š¸¨¸œ¨¼ (methylene blue)
œŸ·ª®œoµ¢d ¨r¤ÅššµÁœ¸¥¤Å—°°„ÅŽ—r „µ¦š—¨°ŠÁ¦·É ¤‹µ„œÎµ„¦³‹„Ũ—rš¸É Á‡¨º°¢d ¨r¤ÅššµÁœ¸ ¥¤Å—°°„ÅŽ—r¨oª
ލn Ĝµ¦¨³¨µ¥Á¤š¸¨¸œ¨¼ ‡ªµ¤Á o¤ oœÁšn µ„´ 0.05 m mol/l ¨o ªš·ÊŠÄ®o®oŠÄœš¸É¤º— ‹µ„œ´ÊœœÎµ·ÊœŠµœÅžª´ —
‡nµ„µ¦nŠŸnµœÂŠ—oª¥Á‡¦ºÉ°ŠÁž„ئâؤ·Á˜°¦r ×¥„ε®œ—Ä®o‡nµ„µ¦nŠŸnµœÂŠš¸É‡ªµ¤¥µª‡¨ºÉœÁšn µ„´ 650 nm
Áž}œ‡nµ TO (‡nµ„µ¦nŠŸnµœÂŠ„n °œ´¤Ÿ´ Š°´¨˜¦µÅªÃ°Á¨˜) ‹µ„œ´Êœ‹¹ŠœÎµ·ÊœŠµœÅž¦´ÂŠ°´ ¨˜¦µÅªÃ°Á¨˜Äœ
„¨n°Šš¹ ÂŠ‹µ„®¨°—°´¨˜¦µÅªÃ°Á¨˜ °Š Phillips ¦»n œ CLEO COMPACT œµ— 15 W ×¥š»„ 1 ´ÉªÃ¤Š‹³œÎµ
·ÊœŠµœ°°„‹µ„„¨n°Šš¹ ÂŠ¤µª´—‡n µ„µ¦nŠŸnµœÂŠš¸É‡ªµ¤¥µª‡¨ºÉœÁšnµ„´ 650 nm Áž}œ‡nµ Ti (‡nµ„µ¦nŠŸnµœÂŠ
®¨´ Š´¤Ÿ´ Š°´¨˜¦µÅªÃ°Á¨˜) š´Ê Šœ¸Ê ¤´˜·Ã¢Ã˜‡³˜³Å¨˜·„ °Š„¦³‹„š¸ÉÁ‡¨º°—oª¥¢d ¨r¤ÅššµÁœ¸¥¤Å—°°„ÅŽ—r
°„—oª¥‡nµÂ°Ž°¦rœŽr ('ABS) Ž¹ÉŠ‡Îµœª–‹µ„¤„µ¦ 'ABS = ln TO / Ti (Zeman and Takabayashi, 2002)