เอกสารการประชุมวิชาการและเสนอผลงานวิจัย มหาวิทยาลัยทักษิณ ครั้งที่ 19 2552 - page 121

„µ¦ž¦³»¤ª·µ„µ¦Â¨³Áœ°Ÿ¨Šµœª·‹´¥ ¤®µª·š¥µ¨´¥š´„¬·– ‡¦´ÊŠš¸É 19 ž¦³‹Îµže 2552
10
3. ¤´ ˜· „µ¦šœœÊ娳‡ªµ¤¦o °œ ÁœºÉ °Š‹µ„„µ¦Äo Šµœ‹¦·Š„¦³‹„ÁŠµn °Š®¨´ Š¦™¥œ˜r ‹³°¥¼n Ĝ
£µ¡Âª—¨o °¤š¸É°µ‹˜o °Š´¤Ÿ´ œÊÎ µ®¦º°‡ªµ¤¦o °œ Ž¹ÉŠšÎµÄ®o µ¦Á‡¨º°®¦º°¢d¨r¤µŠš¸É Á‡¨º°°µ‹®¨»—¨°„°°„‹µ„
Ÿ·ª„¦³‹„Å—o —´Šœ´Ê œ„¦³‹„ÁŠµ¥µœ¥œ˜rš¸É ¤¸‡»–£µ¡¼Š‹³˜o °Šµ¤µ¦™šœœÊ娳‡ªµ¤¦o°œÅ—o —¸ Šµœª·‹´ ¥œ¸ÊŗoœÎµ
„¦³‹„ÁŠµÃ‡¦Á¤¸¥¤š¸É¤¸‡ªµ¤®œµ¢d¨r¤˜´ÊŠÂ˜n 15 – 100 nm ¤µš—°Ã—¥œÎµÅžÂnĜœÊε DI š¸É¤¸‡nµ pH ž¦³¤µ– 6-8
š¸É °»–®£¼¤· 40 O C œµœ 120 ´ÉªÃ¤Š Ÿ¨„µ¦«¹„¬µ¡ªnµ„¦³‹„ÁŠµÃ‡¦Á¤¸¥¤š»„·Ê œÄoĜ„µ¦š—°Å¤n¤¸„µ¦®¨»—¨°„
°Š¢d ¨r¤Ã‡¦Á¤¸¥¤ —Šªnµ„¦³‹„ÁŠµÃ‡¦Á¤¸ ¥¤š¸ÉÁ‡¨º°—oª¥Áš‡œ·‡ž{˜Á˜°¦·Šµ¤µ¦™šœœÊ娳‡ªµ¤¦o°œÅ—oÁž}œ
°¥n µŠ—¸ ÁœºÉ°Š‹µ„¡¨´ŠŠµœ °ŠÅ°µ¦Á‡¨º°Ã‡¦Á¤¸ ¥¤š¸Éŗo‹µ„„¦³ªœ„µ¦ž{˜Á˜°¦· Š¤¸ ‡nµ¼Š¤µ„ Ž¹ÉŠÁ¤ºÉ°ª·ÉŠÁ oµœ
¨³‡ªÂœnœ¡°„¡¼œÁž} œ´Êœ °ŠÃ‡¦Á¤¸¥¤µŠÇ œŸ·ª„¦³‹„œ´Êœ Å°µ¦Á‡¨º °¡¨´ŠŠµœ¼Šœ¸Ê‹³¤¸„µ¦ {Š˜´ª¨ŠÄœ
ÁœºÊ° °ŠŸ·ª„¦³‹„Á¨È „œo°¥ „n°œ‹´ ˜´ªÂ¨³¢°¦r ¤Áž}œ´Êœ °Š¢d ¨r¤˜n°ÁœºÉ°Šš´ÉªŸ·ª®œoµ„¦³‹„ šÎ µÄ®o¢d ¨r¤Ã‡¦Á¤¸¥¤
š¸É Á‡¨º°Å—o¤¸„µ¦¥¹—˜·—„´Ÿ·ª®œoµ °Š„¦³‹„—¸ „¦³‹„ÁŠµÃ‡¦Á¤¸¥¤‹¹Šµ¤µ¦™šœœÊε ¨³‡ªµ¤¦o °œÅ—o—¸
¦»žŸ¨„µ¦ª·‹´¥
¢d ¨r¤Ã‡¦Á¤¸¥¤š¸ÉÁ‡¨º °—oª¥Áš‡œ· ‡ž{˜Á˜°¦· ŠÄœŠµœª·‹´¥œ¸Ê¤¸ „µ¦„¦³‹µ¥˜´ª °Šµ¦Á‡¨º °¤ÉεÁ¤°
š´É ª·Ê œŠµœ Á¤ºÉ °‡ªµ¤®œµ¢d ¨r¤œo°¥Ç ‹³¤¸ „µ¦³šo°œÂ¨³n ŠŸn µœÂŠÅ—o Á¨È „œo °¥ ˜nÁ¤ºÉ °¢d¨r¤®œµ¤µ„ ¹Ê œ
„µ¦³šo °œÂŠÁ¡·É ¤ ¹Êœ –³š¸É„µ¦n ŠŸnµœÂŠ¨—¨Š ¢d ¨r¤Ã‡¦Á¤¸¥¤š¸ÉÁ‡¨º°Å—o ¤¸¦¼žÂ„µ¦Á¨¸Ê¥ªÁœ¦´ Š¸Á°„Žr
š¸É ¤»¤ 2 T = 43.50 O ˜¦Š„´ Cr(111) ‡n µ„µ¦³šo°œÂŠ °Š¢d ¨r¤Ã‡¦Á¤¸¥¤‹³Á¡·É¤ ¹Ê œ˜µ¤‡ªµ¤®œµ¢d¨r¤ ¨³
¤¸‡nµ¼Š»—ž¦³¤µ– 68% š¸É‡ªµ¤®œµ¢d¨r¤Ášnµ„´40 nm n ªœ‡nµ„µ¦nŠŸnµœÂŠ‹³¨—¨ŠÁ¤ºÉ°‡ªµ¤®œµ¢d¨r¤Á¡·É¤ ¹Êœ
×¥‹³¤¸‡nµÁ oµÄ„¨o«¼œ¥rÁ¤ºÉ °¢d¨r¤¤¸‡ªµ¤®œµ¤µ„„ªnµ 50 nm „¦³‹„ÁŠµÃ‡¦Á¤¸¥¤š¸É Á‡¨º°—oª¥Áš‡œ· ‡ž{˜Á˜°¦· ŠÄœ
Šµœª·‹´¥œ¸Ê¤¸‡nµ„µ¦³šo°œÂŠ „µ¦¥¹—˜· — „µ¦šœœÊ娳‡ªµ¤¦o°œÁž}œÅž˜µ¤¤µ˜¦“µœ °ŠÃ¦ŠŠµœ
‡Îµ °‡»–
Šµœª· ‹´¥œ¸Êŗo¦´š»œ°»—®œ» œ„µ¦ª·‹´¥‹µ„ εœ´„Šµœ„°Šš»œœ´œ» œ„µ¦ª·‹´¥ („ª.) iµ¥°»˜µ®„¦¦¤
ǦŠ„µ¦Ã‡¦ŠŠµœ°»˜µ®„¦¦¤Îµ®¦´ ž¦·µ˜¦¸ ž¦³‹Îµže 2551 ¦®´ ǦŠ„µ¦ I251A05015
Á°„µ¦°oµŠ°·Š
™µ´ œ¥µœ¥œ˜r. (2550). ǦŠ„µ¦‹´—šÎµÂŸœÂ¤nš°»˜µ®„¦¦¤¥µœ¥œ˜r (¡.«.2550-2554). º‡oœÁ¤ºÉ°ª´œš¸É 20
¤„¦µ‡¤ 2551, ‹µ„ http://www.thaiauto.or.th/technical_document/document/ǦŠ„µ¦ÂŸœÂ¤nš.pdf.
¡· Á¬“ ¨·Ê¤» ª¦¦– ¨³›œ´ ™µ ¦´˜œ³. (2547). „µ¦ª·‹´¥Â¨³¡´•œµ„µ¦Á‡¨º °Ÿ·ªÃ¨®³—oª¥ª·›¸ ž{ ˜Á˜°¦·Š˜µ¤ÂŸœ
ž¦´Ã‡¦Š¦oµŠ°»˜µ®„¦¦¤ ¦³¥³š¸É 2. εœ´ „Šµœ„°Šš»œœ´œ»œ„µ¦ª·‹´¥: „¦»ŠÁš¡².
Bunshah, R.F. (1994). Handbook of deposition technologies for films and coatings. New Jersey: Noyes
Publications.
Wasa, K. and S. Hayakawa. (1992). Handbook of sputter deposition technology: principles, technology and
applications. New Jersey: Noyes Publications.