full2010.pdf - page 187

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„µ¦Á˜¦¸¥¤„¦³‹„šÎµ‡ªµ¤³°µ—˜´ªÁ°Š—o ª¥Áš‡œ·‡ž{˜Á˜°¦·ŠÎµ®¦´„¦³‹„ÁŠµn°Š®¨´Š¦™¥œ˜r
Preparation of Self Cleaning Glass by Sputtering Technique for Car Rear View Mirror
œ· ¦´œ—¦r ª·š·˜°œ´œ˜r1* £. ¡¹ÉŠ» žµœ«·¨µ2 °—·«¦ ¼¦–ªŠ«r1 »¦·Š®r ō¥‡»–1 ¨³ ¥µ¤ ª¸ ¦ª·«„»¨3
Nirun Witit-anun1*, P. Pungboon Pansila2, Adisorn Buranawong1, Surasing Chaiyakun 1 and Siam Weerawitkul3
š‡´—¥n °
¢d ¨r¤µŠÅššµÁœ¸¥¤Å—°°„ÅŽ—r (TiO2) Á‡¨º°—oª¥ª·›¸ —¸Ž¸ ¦¸Â°‡˜¸ ¢ ¤„œ¸˜¦°œ ž{˜Á˜°¦·Š Á¡ºÉ°«¹ „¬µ
¤´˜·Ã¢Ã˜‡³˜³Å¨˜·„¨³Å±Ã—¦¢d¨·„ 宦´šÎµ„¦³‹„šÎ µ‡ªµ¤³°µ—˜´ªÁ°Š ×¥Á‡¨º°¢d¨r¤š¸É°´˜¦µÅ®¨Â„p
°°„Ž·Á‹œ˜nµŠ„´œ «¹„¬µÃ‡¦Š¦oµŠŸ¨¹„ °Š¢d¨r¤—oª¥Áš‡œ·‡ XRD ‡ªµ¤®œµÂ¨³¨´„¬–³¡ºÊœŸ· ª—oª¥Áš‡œ· ‡ AFM
¤´˜·Ã¢Ã˜‡³˜³Å¨˜·„¨³Å±Ã—¦¢d¨·„ž¦³Á¤·œ‹µ„„µ¦¥n°¥¨µ¥µ¦¨³¨µ¥Á¤š¸ ¨¸œ¼¨Â¨³¤»¤´ ¤Ÿ´ Ÿ¨„µ¦«¹„¬µ
¡ªnµ¢d¨r¤š¸Éŗo¤¸Ã‡¦Š¦oµŠŸ¨¹„°œµÁš°´ ˜¦µÅ®¨Â„p °°„Ž·Á‹œ¤¸ Ÿ¨˜n°‡ªµ¤®œµÂ¨³‡ªµ¤®¥µŸ· ª °Š
¢d¨r¤ ¢d¨r¤š¸ÉÁ‡¨º°Å—o µ¤µ¦™Â—Š¤´˜·Ã¢Ã˜‡³˜³Å¨˜·„¨³Å±Ã—¦¢d¨·„Å—oÁ¤ºÉ°´¤Ÿ´ „´ÂŠ°´¨˜¦µÅªÃ°Á¨˜Å—o
‡ÎµÎµ‡´ : ¢d¨r¤µŠ ¦¸Â°‡˜¸¢ ž{˜Á˜°¦·Š ŚšµÁœ¸¥¤Å—°°„ÅŽ—r â؇³˜³Å¨˜·„ űצ¢d¨·„
Abstract
Titanium dioxide thin films (TiO2) have been deposited by reactive magnetron sputtering technique to
study photocatalytic and hydrophilic property, for make a self cleaning glass. The films were deposited under
different oxygen flow rate. The crystal structure was characterized by XRD, thickness and surface morphology
were evaluated by AFM. The photocatalytic and hydrophilic property was evaluated by the measurement of the
decomposition of methylene blue and contact angle, respectively. The results showed that the deposited films has
anatase phase. The films’ thickness and roughness were influenced by the oxygen flow rate. The deposited films
showed the photocatalytic and hydrophilic property when expose to the UV light.
Keywords : Thin film, Reactive sputtering, Titanium dioxide, Photocatalytic, Hydrophilic
1 ®o°Šž’·´ ˜·„µ¦ª·‹´¥¡¨µ¤µÎµ®¦´ª·š¥µ«µ˜¦r¡ºÊœŸ·ª £µ‡ª·µ¢d ·„r ‡–³ª·š¥µ«µ˜¦r ¤®µª·š¥µ¨´¥¼¦¡µ ‹.¨»¦¸ 20131
Plasma for Surface Science Research Laboratory, Department of Physics, Faculty of Science, Burapha University, Chonburi 20131.
* Corresponding author: Ú¦«´¡šr/Ú¦µ¦ 038-103-084 Email: nirun@buu.ac.th.
2 µ µª·š¥µ«µ˜¦r¡ºÊœ“µœÂ¨³¡¨«¹„¬µ ‡–³š¦´ ¡¥µ„¦Â¨³·ÉŠÂª—¨o °¤ ¤®µª·š¥µ¨´¥Á„¬˜¦«µ˜¦r ª·š¥µÁ ˜«¦¸¦µµ ‹. ¨»¦¸ 20230
Department of Fundamental Science and Physical Education, Faculty of Resources and Environment, Kasetsart University
Sriracha Campus, Chonburi 20230.
3 ¦·¬´ š œµÃœ ¤·Á¦°¦r °·œ—´ š¦¸Ê ‹Îµ„´ — 128/776 Ž.Ś¥ž¦³„´œ 1 ™.Áš¡µ¦´„¬r ˜.µŠÁµ›Š „·É Š °.µŠÁµ›Š ‹.¤»š¦ž¦µ„µ¦ 10540
NANO MIRROR INDUSTRY CO., LTD, 128/776 Soi Thaiprakan 1, Theparak Rd. Bangsaothong Samutprakarn 10540. Thailand.